Levitation Micro-Systems
This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and –actuators. It proposes and discusses analytical and quasi-finite element techniques f…
- Edition
- -
- ISBN/ISSN
- 978-3-030-58908-0
- Collation
- IX, 174p.:ill
- Series Title
- Microsystems and Nanosystems
- Call Number
- 621.381 Pol l
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Found 1 from your keywords: Author : Poletkin,Kirill
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