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Levitation Micro-Systems
Poletkin,Kirill

This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and –actuators. It proposes and discusses analytical and quasi-finite element techniques f…

Edition
-
ISBN/ISSN
978-3-030-58908-0
Collation
IX, 174p.:ill
Series Title
Microsystems and Nanosystems
Call Number
621.381 Pol l
Availability1
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