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Integration of Functional Oxides with Semiconductors

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This book describes the basic physical principles of the oxide/semiconductor epitaxy and offers a view of the current state of the field. It shows how this technology enables large-scale integration of oxide electronic and photonic devices and describes possible hybrid semiconductor/oxide systems. The book incorporates both theoretical and experimental advances to explore the heteroepitaxy of tuned functional oxides and semiconductors to identify material, device and characterization challenges and to present the incredible potential in the realization of multifunctional devices and monolithic integration of materials and devices. Intended for a multidisciplined audience, Integration of Functional Oxides with Semiconductors describes processing techniques that enable atomic-level control of stoichiometry and structure and reviews characterization techniques for films, interfaces and device performance parameters. Fundamental challenges involved in joining covalent and ionic systems, chemical interactions at interfaces, multi-element materials that are sensitive to atomic-level compositional and structural changes are discussed in the context of the latest literature. Magnetic, ferroelectric and piezoelectric materials and the coupling between them will also be discussed. GaN, SiC, Si, GaAs and Ge semiconductors are covered within the context of optimizing next-generation device performance for monolithic device processing.

Availability
Inventory Code Barcode Call Number Location Status
1408000610EB0002990621.38 Dem iCentral Library (OPAC)Available
Detail Information
Series Title
-
Call Number
621.38 Dem i
Publisher
New York : Springer New York, NY.,
Collation
x, 278.: Ill.
Language
English
ISBN/ISSN
978-1-4614-9320-4
Classification
621.38
Content Type
Ebook
Media Type
-
Carrier Type
online resource
Edition
1
Subject(s)
Metal oxide semiconductors
Oxide coating
Epitaxy
Specific Detail Info
-
Statement of Responsibility
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No other version available

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